
                                                                                Material | 
                                                                        N/A Brass | 
                                                                                Orifice Material | 
                                                                        N/A Synthetic Sapphire | 
                                                                                CV | 
                                                                        N/A 0.00094 | 
                                                                                Nominal Orifice Size | 
                                                                        N/A 16 | 
                                                                                Maximum Operating Pressure | 
                                                                        N/A 100 psig | 
                                                                                Orifice Diameter | 
                                                                        N/A 0.0063 in | 
                                                                                Orifice Diameter Accuracy | 
                                                                        N/A ±0.0003 in | 
                                                                                Width Across Flats (Hex) | 
                                                                        N/A 3/16 in | 
                                                                                Total Length | 
                                                                        N/A 9/16 in | 
| 
                                                                         
                                                                            N/A
                                                                              | 
                                                    
                                                                                Air Flow at Pressure - Standard Liters Per Minute (SLPM)_Sapphire | 
                                                                        N/A 1 psig: 0.106 5 psig: 0.256 10 psig: 0.357 15 psig: 0.443 20 psig: 0.525 25 psig: 0.605 30 psig: 0.685 40 psig: 0.845 50 psig: 1.00 60 psig: 1.16 70 psig: 1.32 80 psig: 1.48 90 psig: 1.64 100 psig: 1.80 | 
                                                                                Air Flow at Vacuum - Standard Liters Per Minute (SLPM)_Sapphire | 
                                                                        N/A 5 In. Hg.: 0.156 10 In. Hg.: 0.200 | 
                                                                                Air Flow at Vacuum, Choked Flow - Standard Liters Per Minute (SLPM)_Sapphire | 
                                                                        N/A 15 In. Hg.: 0.214 20 In. Hg.: 0.214 30 In. Hg.: 0.214 | 
                                                                                Air Flow at Pressure - Standard Cu. Ft. Per Hour (SCFH)_Sapphire | 
                                                                        N/A 1 psig: 0.225 5 psig: 0.542 10 psig: 0.756 15 psig: 0.939 20 psig: 1.11 25 psig: 1.28 30 psig: 1.45 40 psig: 1.79 50 psig: 2.13 60 psig: 2.46 70 psig: 2.80 80 psig: 3.13 90 psig: 3.47 100 psig: 3.81 | 
                                                                                Air Flow at Vacuum - Standard Cu. Ft. Per Hour (SCFH)_Sapphire | 
                                                                        N/A 5 In. Hg.: 0.331 10 In. Hg.: 0.424 | 
                                                                                Air Flow at Vacuum, Choked Flow - Standard Cu. Ft. Per Hour (SCFH)_Sapphire | 
                                                                        N/A 15 In. Hg.: 0.453 20 In. Hg.: 0.453 30 In. Hg.: 0.453 |